| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus, method and program for focus correction, and microscope which can stabilize the focus even when non-optical system elements generate a drift in different direction from the direction of a drift caused by optical system. <P>SOLUTION: The temperature is measured using temperature-sensitive element placed on one side, a plane for a preparation to be set as a reference, and then the temperature is measured using temperature-sensitive element placed on the other side, a plane for a preparation to be set as a reference. The displacement to the focus position is calculated based on the measured temperatures. <P>COPYRIGHT: (C)2012,JPO&INPIT |
