| 发明名称 |
METHOD FOR PRODUCING THIN FILM, AND PRODUCTION APPARATUS |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing thin film having higher film density using the spray film-forming method. <P>SOLUTION: The method for producing thin film includes the sequential steps: forming liquid drops by spraying stock solution in which a solute is dissolved or dispersed in a solvent; volatilizing and concentrating the solvent in the liquid drops; and depositing the concentrated liquid drops on a substrate or thin film provided on the substrate. In the method, liquid drops with mutually different drop sizes are simultaneously deposited. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2011218282(A) |
申请公布日期 |
2011.11.04 |
| 申请号 |
JP20100089319 |
申请日期 |
2010.04.08 |
| 申请人 |
FUJIFILM CORP |
发明人 |
OKI KAZUHIRO;ANDO HIROTOSHI |
| 分类号 |
B05D1/02;B05B7/02;B05B13/00;H01L51/50;H05B33/10 |
主分类号 |
B05D1/02 |
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