发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD FOR THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which can prevent a passivation film from being removed from top-layer wiring composed of materials whose principal constituent is Cu. <P>SOLUTION: A semiconductor device 1 includes: an interlayer insulating film 26; a passivation film 33 composed of insulating materials and formed on the interlayer insulating film 26; top-layer wiring 28 composed of materials whose principal constituent is copper, and formed between the passivation film 33 and a surface of the interlayer insulating film 26; and a wiring coating film 31 composed of materials whose principal constituent is aluminium, and interposed between the passivation film 33 and the surface of the top-layer wiring 28 to coat the surface of the top-layer wiring 28. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011222963(A) 申请公布日期 2011.11.04
申请号 JP20110004357 申请日期 2011.01.12
申请人 ROHM CO LTD 发明人 MORIYAMA KEI;TAMAKI SHUICHI;SAKO SHUICHI;KORI MITSUHIDE;GOSHIMA JUNJI;SAWADA TATSUYA
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L21/82 主分类号 H01L23/52
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