| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable use even in an air pressure atmosphere other than atmospheric pressure, in a micro-displacement output device using a thin-sheet cover part. <P>SOLUTION: This micro-displacement output device 10 comprises a casing part 12, an upper cover part 30 and a lower cover part 34, and a plurality of flat plate-like moving pieces 60 and thin sheet-like moving pieces 80 are alternately aligned and arranged along the axial direction of a center shaft 40 in its inside storage space 14. A plurality of thin grooves extending to an outer peripheral part from a central part are respectively arranged on a surface and a reverse surface of the plate-like moving pieces 60. The upper cover part 30 and the lower cover part 34 constituted of a thin-sheet membrane are fixed at both ends of the center shaft 40. A gas communicating hole 20 is arranged in a bottom surface part 16 of the casing part 12, and a recess 18 opposite to the lower cover part 34 on the reverse side of the bottom surface part 16, is set in the same atmospheric pressure as the storage space 14. <P>COPYRIGHT: (C)2012,JPO&INPIT |
