| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wiring material which does not lose conductivity even under an oxidation process at 500°C, which has a work function of TiN or higher, and which is less expensive than precious metals. <P>SOLUTION: A wiring material which is a NiTi mixture film and has a Ti content, represented by Ti/(Ni+Ti), with a composition ratio of 60-80 at.% is used and transformed into a mixture film containing Ni and TiO<SB POS="POST">2</SB>through a high-temperature oxidation process at 500°C or higher. <P>COPYRIGHT: (C)2012,JPO&INPIT |
