| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable measuring the height of a photo spacer with accuracy regardless of its shape. <P>SOLUTION: For a luminance signal whose peak value indicating a focal point cannot be detected, i.e., a luminance signal whose maximum value is under a predetermined threshold value, a height measuring process is not performed and corresponding data is deleted instead. Thus, by removing signals indicating abnormal height at edge portions of a cylindrical spacer and measuring the height of portions other than the edge portions, the height of the cylindrical spacer can be measured with accuracy. <P>COPYRIGHT: (C)2012,JPO&INPIT |
