发明名称 TEST ELEMENT GROUP AND SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a test element group which allows more elements to be mounted in a small area and can precisely measureg element characteristic, and a semiconductor device equipped with the same. <P>SOLUTION: In respective groups G<SB POS="POST">N</SB>, all input terminals IN are connected to a common drain source line DSL. In the groups G<SB POS="POST">N</SB>, all output terminals OUT are connected to a drain source line DSL that is not connected to the input terminal IN in such manner that the drain source line DSL is not shared with other output terminal OUT. Further, the common drain source line DSL in one group G<SB POS="POST">N</SB>and the common drain source line DSL in other group G<SB POS="POST">N</SB>are different from each other. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011222547(A) 申请公布日期 2011.11.04
申请号 JP20100086312 申请日期 2010.04.02
申请人 SONY CORP 发明人 BAIRO MASAAKI
分类号 H01L21/66 主分类号 H01L21/66
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