| 摘要 |
PURPOSE: A gantry stage with one lm guide and magnetization-reversal single-sided linear motor are provided to use only the first row of an LM guide by using a single-sided linear motor. CONSTITUTION: In a gantry stage with one lm guide and magnetization-reversal single-sided linear motor, One LM guide(51) is accepted to a base(52). A permanent magnet(53) having a plurality of N poles and S poles is arranged under the base. A single-side linear motor(54) is arranged in the lower part of the permanent magnet. The base has a rectangular long frame. The base is formed with aluminum. A hollow is formed inside the base. The single-side linear motor is formed into an iron-core motor. |
