TRAY AND SUBSTRATE PROCESSING APPARATUS USING SAME AND METHOD FOR MANUFACTURING TRAY

摘要

The present invention relates to a tray and a substrate processing apparatus using the same and a method for manufacturing a tray. The method for manufacturing the tray comprises the steps of: preparing a base plate; forming a first coating layer to surround edges of the base plate; and forming a second coating layer on an entire surface of the base plate including the first coating layer using a vapor deposition process.