| 摘要 |
<p>Disclosed is a positive radiation-sensitive composition containing: a polymer [A] containing, in the same or different polymer molecules, a structural unit (I) having a group represented by formula (1), and an epoxy group-containing structural unit (II); an acid generator [B]; and at least one nitrogen-containing compound [C] selected from a group comprising nitrogen-containing compounds represented by the formula (2) and nitrogen-containing compounds represented by the formula (3). At least one group selected from a group comprising R6 in formula (2) as well as R9 and R10 in formula (3) is preferably a tert-butyl group, a tert-amyl group, a 1-methylcyclohexyl group, or a 1-ethylcyclohexyl group.</p> |
