METHOD FOR FORMING A MULTI-LEVEL SURFACE ON A SUBSTRATE WITH AREAS OF DIFFERENT WETTABILITY AND A SEMICONDUCTOR DEVICE HAVING THE SAME

摘要

The invention relates to a method 10 for forming a multi-level surface on a substrate 2, wherein said surface comprises areas of different wettability, the method comprising the step (A, B) of applying a multi-level stamp to the substrate for forming the multi-level surface, said multi-level stamp having different structural regions 1a arranged along the multi-level surface for locally altering wettability properties of at least a portion of a level of the multi-level surface 2a, 2b. The invention further relates to a semiconductor device and a method for manufacturing a semi-conductor device.