TESTING APPARATUS FOR THE SURFACE OF SEMICONDUCTOR AND TESTING METHOD FOR PIN-HOLE FORMED ON THE SURFACE OF SEMICONDUCTOR USING THE SAME

摘要

PURPOSE: A semiconductor surface inspecting apparatus and a pinhole inspection method using the same in which the pinhole is arranged on the insulating layer of the semiconductor are provided to prevent defective product production generated in a super-integrated semiconductor device production line in beforehand, thereby significantly improving productivity and price competitiveness. CONSTITUTION: A semiconductor test sample(100) is mounted in a fixing plate(200). A transparent substrate(300) is separately arranged from the fixing plate. A light source(500) projects light from the upper part of the transparent substrate. A voltage source(600) generates a voltage difference between the semiconductor test sample and an electrode. A current measurement device(700) measures a current flowing between the semiconductor test sample and electrode.