| 摘要 |
<p>Disclosed is a positive radiation-sensitive composition containing: a polymer [A] having, in the same or different polymer molecules, a structural unit (I) containing a group represented by formula (1), and an epoxy group-containing structural unit (II); a siloxane polymer [B]; and a photoacid generator [C]. The siloxane polymer [B] is preferably a hydrolytic condensate of a hydrolytic silane compound represented by formula (2). The mass ratio of the polymer [A] to the total of the polymer [A] and the siloxane polymer [B] is preferably 5 - 95 mass%.</p> |
