| 摘要 |
PURPOSE: A process liquid supply apparatus is provided to contact the lower end part of a process liquid supply part with the lower part of a container main body, thereby suppressing process liquid residues within the container main body. CONSTITUTION: An outer container part(73) is coaxially installed with respect to an inner container part(53). A cylindrical part(81) is surrounded by a lateral wall part(74) of a handle(72). The upper boundary of the cylindrical part is projected to the inside and inserted between a flange(38). A gear part(83) is welded and projected to the outside of the cylindrical part in the outer circumference of the cylindrical part. The gear part respectively includes a combining surface in one side and the other side along a boundary direction. |
