Methods for monitoring processing equipment are provided herein. In some embodiments, a method for monitoring processing equipment when in an idle state for a period of idle time may include selecting a test from a list of a plurality of tests to perform on the processing equipment when the processing equipment is in the idle state, wherein the test has a total run time; starting the selected test; comparing a remaining idle time of the period of idle time to a remaining run time of the total run time as the selected test is performed; and determining whether to end the selected test prior to completing the total run time in response to the comparison.
申请公布号
WO2011136959(A2)
申请公布日期
2011.11.03
申请号
WO2011US32864
申请日期
2011.04.18
申请人
APPLIED MATERIALS, INC.;CRUSE, JAMES, P.;CANTWELL, DERMOT;RICE, MICHAEL, R.;KRIL, THORSTEN;HARDY, CHARLES
发明人
CRUSE, JAMES, P.;CANTWELL, DERMOT;RICE, MICHAEL, R.;KRIL, THORSTEN;HARDY, CHARLES