Ceramic roller bearing for use in end block of e.g. pipe magnetron arrangement utilized in vacuum coating system for coating substrate, has roller bodies arranged in body cage between inner and outer rings, where rings have partial rings

摘要

The bearing has a circular ceramic inner ring (2) and a circular ceramic outer ring (1) with concave roller body paths (11, 21), respectively. A roller body cage (4) is arranged between the inner ring and the outer ring, and a set of ceramic roller bodies (3) is arranged in a single row in the roller body cage between the inner ring and the outer ring, where the inner ring and/or the outer ring have two partial rings (24, 25). A plastic pane is arranged between the partial rings, and the roller body paths are limited by different high roller body path shoulders (12, 13, 22, 23). An independent claim is also included for an end block for a magnetron arrangement comprising a ceramic roller bearing.