发明名称 |
STACKED LATERAL OVERLAP TRANSDUCER (SLOT) BASED THREE-AXIS ACCELEROMETER |
摘要 |
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using accelerometers. Some such accelerometers include a substrate, a first plurality of electrodes, a second plurality of electrodes, a first anchor attached to the substrate, a frame and a proof mass. The substrate may extend substantially in a first plane. The proof mass may be attached to the frame, may extend substantially in a second plane and may be substantially constrained for motion along first and second axes. The frame may be attached to the first anchor, may extend substantially in a second plane and may be substantially constrained for motion along the second axis. A lateral movement of the proof mass in response to an applied lateral acceleration along the first or second axes may result in a change in capacitance at the first or second plurality of electrodes. |
申请公布号 |
WO2011136960(A1) |
申请公布日期 |
2011.11.03 |
申请号 |
WO2011US32869 |
申请日期 |
2011.04.18 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC.;STEPHANOU, PHILIP, JASON;BURNS, DAVID, WILLIAM;SHENOY, RAVINDRA, VAMAN |
发明人 |
STEPHANOU, PHILIP, JASON;BURNS, DAVID, WILLIAM;SHENOY, RAVINDRA, VAMAN |
分类号 |
G01P15/125;G01P15/08;G01P15/18 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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