| 摘要 |
Methods and apparatus for twin chamber processing systems are disclosed, and, in some embodiments, may include a first process chamber and a second process chamber having independent processing volumes and a plurality of shared resources between the first and second process chambers. In some embodiments, the shared resources include at least one of a shared vacuum pump, a shared gas panel, or a shared heat transfer source. |
| 申请人 |
APPLIED MATERIALS, INC.;XU, MING;NGUYEN, ANDREW;LEE, EVANS;LEE, JARED, AHMAD;CRUSE, JAMES, P.;COBB, CORIE, LYNN;SALINAS, MARTIN, JEFF;SHEYNER, ANCHEL;GOLD, EZRA, ROBERT;LANE, JOHN, W. |
发明人 |
XU, MING;NGUYEN, ANDREW;LEE, EVANS;LEE, JARED, AHMAD;CRUSE, JAMES, P.;COBB, CORIE, LYNN;SALINAS, MARTIN, JEFF;SHEYNER, ANCHEL;GOLD, EZRA, ROBERT;LANE, JOHN, W. |
