Sound receiving sensor arrangement for cavitation detection in liquid with high ultrasound excitation frequencies for cleaning materials utilized in semiconductor technology, has piezo element firmly attached to end surface of collar

摘要

The arrangement has a sound receiving sensor comprising a compact cylindrical sound receiver (1). The sensor receiver is provided with a contacting area (8) of a free end of a sound transducer to about half the length of the sensor, in an outer surface that is opposite to an ultrasonic coupling (7). The free end of the sound transducer is located inside a sensor housing (3), and comprises a cylindrical collar (6). A piezo element (2) is firmly attached to a circular and planar end surface of the collar. The sound receiver is made of homogeneous silicate material.