PLASMA TORCH FOR FABRICATING A SILICA-GLASS AND PROCESS CHAMBER WITH THE SAME

摘要

PURPOSE: A plasma torch for manufacturing quartz glass and a reacting chamber equipped with the same are provided to improve the purity of anhydrous quartz glass using a plasma heating source instead of oxy-hydrogen flame. CONSTITUTION: A plasma torch for manufacturing quartz glass includes a reactive gas transferring pipe(10) and a plasma forming part. The reactive gas transferring pipe includes a first tube, a second tube, and a third tube. The plasma forming part is combined with the reactive gas transferring pipe and generates and maintains plasma by applying high frequency power. The first tube transfers SiCl_4 gas. The second tube transfers inert gas and surrounds the first tube. The third tube transfers oxygen gas and surrounds the second tube.