THERMAL SENSOR USING A VIBRATING MEMS RESONATOR OF A CHIP INTERCONNECT LAYER
摘要
Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor temperature in an integrated circuit. Fabricating the resonator in an interconnect layer provides a way to implement thermal detection means which is tolerant of manufacturing process variations. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.
申请公布号
WO2011087598(A3)
申请公布日期
2011.11.03
申请号
WO2010US58356
申请日期
2010.11.30
申请人
INTEL CORPORATION;ABDELMONEUM, MOHAMED A.;FISCHER, KEVIN J.;RAHAL-ARABI,, TAWFIK M.;YEOH, ANDREW;TAYLOR, GREGORY F.
发明人
ABDELMONEUM, MOHAMED A.;FISCHER, KEVIN J.;RAHAL-ARABI,, TAWFIK M.;YEOH, ANDREW;TAYLOR, GREGORY F.