SILICON BASED MILLIMETER WAVE WAVEGUIDE TRANSITION

摘要

A waveguide to microstrip transition for converting electromagnetic wave signals to electrical signals comprises a silicon substrate having a trench in a top surface thereof; a polymer material disposed in said trench; a first thin film disposed on said top surface and covering said polymer; and a metallic signal line disposed on a top surface of said first thin film and extending at least partially over said trench; wherein said metallic signal line receives said electromagnetic wave signal and converts said electromagnetic wave signal to said electrical signal.