发明名称 |
VAPOR DRYER HAVING HYDROPHILIC END EFFECTOR |
摘要 |
Embodiments of the present invention generally relate to an apparatus and methods for rinsing and drying substrates. One embodiment provides an end effector comprising a body having a contact tip for contacting an edge area of a substrate, wherein the end effector is configured to support the substrate while the substrate is in a rinsing bath and while the substrate is being dried from the rinsing bath, and the contact tip comprises a hydrophilic material.
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申请公布号 |
US2011266736(A1) |
申请公布日期 |
2011.11.03 |
申请号 |
US201113182301 |
申请日期 |
2011.07.13 |
申请人 |
LEWIS JOHN S;BIESE MICHAEL;SIN GARRETT H;RAMALINGAM CHIDAMBARA A;CHANDRASEKARAN BALAJI;LING TAK FAN KERRY |
发明人 |
LEWIS JOHN S.;BIESE MICHAEL;SIN GARRETT H.;RAMALINGAM CHIDAMBARA A.;CHANDRASEKARAN BALAJI;LING TAK FAN (KERRY) |
分类号 |
B23Q3/00;B24B1/00 |
主分类号 |
B23Q3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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