| 摘要 |
The present invention relates to a microscope device for inspecting structured objects, said microscope device including: a camera (1); an optical imaging means (2) capable of producing, on the camera, an image of the object according to a field of view, and including a distal lens (3) arranged on the side of the object (4); and a low-coherence infrared interferometer (5) including a measurement beam capable of producing measurements by means of interferences between retroreflections of said measurement beam and at least one separate optical reference. The device also includes coupling means (7) for injecting the measurement beam into the optical imaging means in such a way that the beam passes through the distal lens, and the low-coherence infrared interferometer is balanced in such a way that only the measurement beam retroreflections, taking place at optical distances close to the optical distance covered by said beam to the object, produce measurements. |
