发明名称 LDMOS WITH ENHANCED SAFE OPERATING AREA (SOA) AND METHOD THEREFOR
摘要 A laterally double diffused metal oxide semiconductor device includes a well region having a first conductivity, a first carrier redistribution region having the first conductivity type, wherein the second well region is under the well region, and a highly doped buried layer under the second well region. The highly doped buried layer has the first conductivity type and has a dopant concentration less than that of the well region and less than that of the first carrier redistribution region, and the buried layer is tied to the first well region. In addition, a method for forming the laterally double diffused metal oxide semiconductor device, which may use epitaxial growth, is disclosed.
申请公布号 US2011266614(A1) 申请公布日期 2011.11.03
申请号 US20100769779 申请日期 2010.04.29
申请人 KHAN TAHIR A;KHEMKA VISHNU K;ZHU RONGHUA 发明人 KHAN TAHIR A.;KHEMKA VISHNU K.;ZHU RONGHUA
分类号 H01L29/78;H01L21/20 主分类号 H01L29/78
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