发明名称 |
PROCESS FOR THE PRODUCTION OF A COMPOUND SEMICONDUCTOR LAYER |
摘要 |
<p>Process for the production of a I-III-VI-compo.und semiconductor layer (80), in which a substrate (50) is provided (10, 12) with a coating (63) which has a metallic precursor layer (57), the coating (63) is heated and kept for the duration of a process time at temperatures of at least 350 °C (16) and the metallic precursor layer (57) is thereby converted (16), in the presence of a chalcogen (58; 72), into the compound semiconductor layer (80) while areal contact is provided (14; 24) between a preponderant proportion (15a) of a free surface (15a, 15b; 25) of the coating (63) and a cover (60; 70) during at least part of the process time.</p> |
申请公布号 |
WO2011135420(A1) |
申请公布日期 |
2011.11.03 |
申请号 |
WO2011IB00833 |
申请日期 |
2011.04.14 |
申请人 |
CENTROTHERM PHOTOVOLTAICS AG;EISENMANN, LORENZ;KAMPMANN, ANDREAS;KOETSCHAU, IMMO;SCHMID, DIETER |
发明人 |
EISENMANN, LORENZ;KAMPMANN, ANDREAS;KOETSCHAU, IMMO;SCHMID, DIETER |
分类号 |
H01L21/36;C23C8/00;H01L21/02;H01L31/18 |
主分类号 |
H01L21/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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