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发明名称
摘要
申请公布号
JP4808494(B2)
申请公布日期
2011.11.02
申请号
JP20050378761
申请日期
2005.12.28
申请人
发明人
分类号
H01L29/78;H01L21/338;H01L21/8238;H01L27/092;H01L29/778;H01L29/786;H01L29/812
主分类号
H01L29/78
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