发明名称 TUBULAR CONTAINER MADE OF CARBON
摘要 It is an object of the present invention to prevent leakage of a raw material gas or molten silicon in a carbon columnar container which is constructed by connecting plural carbon cylindrical members to each other by a screw portion provided along the periphery of an end of each of the cylindrical members, by sealing a gap present at the connection portion through a high-reliability method that causes no cracking or the like. The carbon columnar container of the invention is a carbon columnar container constructed so as to form a multistage structure by connecting plural carbon cylindrical members to each other by a screw portion provided along the periphery of an end of each of the cylindrical members, wherein each of the cylindrical members connected to each other has such a ring-shaped plane extending from the inner peripheral wall in the diameter direction as to form a ring-shaped butt area on the inner peripheral wall side when the cylindrical members are connected, and the sum of surface roughness (Ra) of the ring-shaped planes to form the butt area is in the range of 1 to 100 µm.
申请公布号 EP1772430(A4) 申请公布日期 2011.11.02
申请号 EP20050753511 申请日期 2005.06.23
申请人 TOKUYAMA CORPORATION 发明人 NAKASHIMA, JUNICHIROU;SAKITA, MANABU;ODA, HIROYUKI;SUGIMURA, SHIGEKI
分类号 C01B33/027;B22D25/04;F27D5/00;H01L21/02 主分类号 C01B33/027
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