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发明名称
In-line gas-phase diffusion furnace
摘要
申请公布号
EP2276057(B1)
申请公布日期
2011.11.02
申请号
EP20090400026
申请日期
2009.05.29
申请人
ROTH & RAU AG
发明人
SCHEIT, UWE, DR.
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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