PLASMA RESISTANT CRYSTAL CERAMIC COATING FILM AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: A plasma resistant crystal ceramic coating membrane and a manufacturing method thereof are provided to secure a crystal ceramic coating membrane over a critical thickness without cracks. CONSTITUTION: A plasma resistant crystal ceramic coating membrane is a layer coated to a thickness of 1-300μm on a substrate which is made of silicon, oxide, nitride, carbide, or non-oxidation ceramic sintered material and has an average surface roughness of 1-100nm. The plasma resistant crystal ceramic coating membrane comprises cations, anions, crystal particles, oxyfluride, oxide and fluoride.