| 摘要 |
PURPOSE: A substrate inspection apparatus and method are provided to form a uniform layer of fine water particles by inducing condensation on a substrate without spray of vapor. CONSTITUTION: A substrate inspection apparatus comprises a light source(110) which irradiates light on a substrate, a substrate cooling unit(132a) which cools the substrate so that vapor is condensed on the substrate surface, and a camera(140) which receives light reflected off the substrate.
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