发明名称
摘要 A silicon single crystal which, over an ingot length of over 10 percent of the total ingot length, has a uniform defect picture and narrow radial dopant and oxygen variations. The process in accordance with the Czochralski method involves bringing about a temperature distribution in the melt in the region of the solidification interface which deviates from rotational symmetry.
申请公布号 JP4808922(B2) 申请公布日期 2011.11.02
申请号 JP20030418099 申请日期 2003.12.16
申请人 发明人
分类号 C30B29/06;C30B15/00;C30B15/14;C30B15/20 主分类号 C30B29/06
代理机构 代理人
主权项
地址