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发明名称
Method for making a device with a suspended membrane
摘要
申请公布号
EP2065336(B1)
申请公布日期
2011.11.02
申请号
EP20080168303
申请日期
2008.11.04
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES
发明人
REY, PATRICE;SALHI, MOUNA
分类号
B81C1/00
主分类号
B81C1/00
代理机构
代理人
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地址
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