REGENERATING PROCESS AND REGENERATING SYSTEM TOREGENERATE WASTE SLURRY FROM WAFERMANUFACTURING PROCESS

摘要

PURPOSE: A method for regenerating a dispersing material in waste slurry generated from a wafer manufacturing process and an apparatus for the same are provided to improve the regenerating efficiency of the waste slurry. CONSTITUTION: A dispersing material and a polishing material are dispersed in a waste slurry generated from a wafer manufacturing process(S100). The dispersing material and the polishing material are defined and extracted in a centrifugal separating method(S200). Solid powder is eliminated from the extracted dispersing material in a filtering process(S300). Moisture contained in the dispersing material is eliminated by heating the dispersing material in a moisture eliminating process(S400). Remaining solid powder is eliminated(S500).