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发明名称
在微影步骤所进行之基板处理方法及半导体装置之制造方法
摘要
申请公布号
TWI351583
申请公布日期
2011.11.01
申请号
TW096120146
申请日期
2007.06.05
申请人
東芝股份有限公司 日本
发明人
早崎圭;盐原英志
分类号
G03F7/16
主分类号
G03F7/16
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
一种基板处理方法,其系逐片地加热处理涂布有含溶剂之膜之被处理基板之基板处理方法,包含:一面使特定流量之气体流向前述被处理基板上,一面将被加热之热板与前述被处理基板接近地配置,藉以特定时间加热前述被处理基板;及加热前述被处理基板后,一面使加热至被涂布于前述被处理基板上之前述含溶剂之膜所含之物质之昇华温度以上之气体流向前述被处理基板上,一面将前述被处理基板冷却至低于前述含溶剂之膜所含之物质之昇华温度之温度。
地址
日本
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