发明名称 Adjustment method for position detection apparatus, exposure apparatus, and device fabrication method
摘要 The present invention provides an adjustment method for a position detection apparatus which comprises an optical system including first and second optical members whose positions can be changed, and detects a position of an object, comprising the steps of calculating a value representing an asymmetry of a detection signal of a light which enters a photoelectric conversion device via the optical system, for each of a plurality of positions of the first optical member in a direction perpendicular to an optical axis of the optical system, specifying a position of the object in the direction of the optical axis, at which the value is insensitive, for each of the plurality of positions, and adjusting a position of the second optical member in the direction perpendicular to the optical axis based on the value at the position of the object specified in the specifying step.
申请公布号 US8049891(B2) 申请公布日期 2011.11.01
申请号 US20080169029 申请日期 2008.07.08
申请人 CANON KABUSHIKI KAISHA 发明人 MAEDA HIRONORI
分类号 G01B11/00;G01B9/00;G01B11/14 主分类号 G01B11/00
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