发明名称 Laser processing machine
摘要 A laser processing machine having a laser beam irradiation unit is provided. The laser beam irradiation unit includes: a laser beam oscillation section; a beam splitter adapted to split the laser beam emitted from the laser beam oscillation section into a first laser beam and a second laser beam; a condenser lens adapted to condense the first and second laser beams; a prism adapted to lead the first and second laser beams split by the beam splitter to the condenser lens; a first angle-changing mirror disposed on a first optical path adapted to lead the first laser beam split by the beam splitter; a second angle-changing mirror disposed on a second optical path adapted to lead the second laser beam split by the beam splitter to the prism; and a half-wave plate disposed in the first or second optical path to allow one of respective directions of the first and second polarization planes to be aligned with the other.
申请公布号 US8049134(B2) 申请公布日期 2011.11.01
申请号 US20080110916 申请日期 2008.04.28
申请人 DISCO CORPORATION 发明人 NOMARU KEIJI;HOSHINO HITOSHI;YAMAGUCHI KOJI
分类号 B23K26/067;H01L21/301 主分类号 B23K26/067
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