发明名称 Method and apparatus for removing radiation side lobes
摘要 A method and structure for removing side lobes is provided by positioning first and second radiation transparent regions of respective first and second phases at a first plane with the first and second phases being substantially out of phase. Further, positioning the first and the second region to cause radiation at a second plane to be neutralized in a first region, not to be neutralized in a second region, and to have a side lobe in a third region. Further, positioning a non-transparent region at the first plane to assure radiation at the second plane to be neutralized in the first region and positioning a third radiation transparent region of the first or second phase at the first plane to neutralize the side lobes in the third region at the second plane.
申请公布号 US8048588(B2) 申请公布日期 2011.11.01
申请号 US20040970077 申请日期 2004.10.20
申请人 GLOBALFOUNDRIES SINGAPORE PTE. LTD. 发明人 TAN SIA KIM;TAN SOON YOENG;LIN QUNYING;CHONG HUEY MING;HSIA LIANG-CHOO
分类号 G03F1/00;G03C5/00;G06F17/50 主分类号 G03F1/00
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