Method and apparatus for linking reticle manufacturing data

摘要

A method includes providing a design data file specifying at least one target feature on a first reticle. A reticle qualification data file specifying a plurality of feature measurements associated with features formed using the first reticle is provided. At least one of the feature measurements is linked to the target feature on the first reticle. The target feature and the linked feature measurement are stored in a data store.