发明名称 Semiconductor chip with backside conductor structure
摘要 Various semiconductor devices and methods of testing such devices are disclosed. In one aspect, a method of manufacturing is provided that includes forming a bore from a backside of a semiconductor chip through a buried insulating layer and to a semiconductor device layer of the semiconductor chip. A conductor structure is formed in the bore to establish an electrically conductive pathway between the semiconductor device layer and the conductor structure. The conductor structure may provide a diagnostic pathway.
申请公布号 US8048689(B2) 申请公布日期 2011.11.01
申请号 US20080237568 申请日期 2008.09.25
申请人 GLOBALFOUNDRIES INC. 发明人 WANG LIANG;BRUCE MICHAEL R.
分类号 H01L21/44;H01L21/66 主分类号 H01L21/44
代理机构 代理人
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