发明名称 |
Method for room temperature chemical vapor deposition on flexible polymer substrates |
摘要 |
A method to deposit a thin film on a flexible polymer substrate at room temperature comprising heating source vapor, which is vaporized by an evaporator, in a shower head in a reaction chamber so that the source vapor is thermally decomposed to be converted into the nano-size single phase; and depositing the source vapor in the nano-size single phase on the flexible polymer substrate which is not separately heated.
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申请公布号 |
US8048483(B2) |
申请公布日期 |
2011.11.01 |
申请号 |
US20070783048 |
申请日期 |
2007.04.05 |
申请人 |
THE INDUSTRY & ACADEMIC COOPERATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC) |
发明人 |
YOON SOON-GIL;SEONG NAK-JIN;JEON SANG-YONG |
分类号 |
B05D3/00 |
主分类号 |
B05D3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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