发明名称 Process for manufacturing a CBRAM memory having enhanced reliability
摘要 The invention relates to a process for manufacturing a plurality of CBRAM memories, each comprising a memory cell in a chalcogenide solid electrolyte, an anode, and a cathode, the process comprising implementing a sublayer of a high thermal conductivity material, higher than 1.3 W/m/K, which covers the set of contacts, then providing, on said sublayer, a triple layer comprising a chalcogenide layer, then an anodic layer, and a layer with second contacts (36), and finally an etching step.
申请公布号 US8048713(B2) 申请公布日期 2011.11.01
申请号 US20080250045 申请日期 2008.10.13
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 SOUSA VERONIQUE;DRESSLER CYRIL
分类号 H01L21/06 主分类号 H01L21/06
代理机构 代理人
主权项
地址