METHOD OF FORMING AN OPTICAL STRUCTURE

摘要

Embodiments provide a method of forming an optical structure on a substrate. The method may include forming a first cladding layer having a first cladding material on the substrate, forming a first photoresist layer on the first cladding layer, patterning the first photoresist layer to form one or more first openings, and depositing a core material selectively into the one or more first openings. The core material forms a core layer and the core layer is in contact with the first cladding layer. The method further includes removing the first photoresist layer, and forming a second cladding layer having a second cladding material on the core layer and the first cladding layer.