| 摘要 |
<p>#CMT# #/CMT# The method involves forming a material of a bar from a layer, where the material rests on a support. Two graphene sheets separated from each other and mobile with respect to each other is formed around the bar. The material is silicon carbide, copper, nickel, iridium, platinum, ruthenium, palladium or amorphous carbon. The bar is fabricated during forming of the material in order to form a non-zero angle with a main plane of the support, where the bar is connected to an area of an anchoring block belonging to the layer. #CMT# : #/CMT# An independent claim is also included for an electro-mechanical system comprising a mobile unit. #CMT#USE : #/CMT# Method for fabricating an electro-mechanical system such as micro-electro-mechanical system (all claimed) i.e. bistable micro-switch. Can also be used for fabricating a micro-motor, micro-turbine or nano electromechanical system e.g. nano-switch, nano-motor and nano-turbine. #CMT#ADVANTAGE : #/CMT# The method improves the reliability and robustness of the electro-mechanical micro-system while allowing components of small size to be conceived in which frictional phenomena are improved and the forces necessary for operating the mobile unit of the micro-system are reduced. The method facilitates the operation and/or the maintaining of the mobile unit in a stable position. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a perspective view of a bistable switch formed using an electro-mechanical component.</p> |
