ORGANIC EL DISPLAY DEVICE, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an organic EL display device that is manufactured inexpensively with high accuracy, and to provide a method of manufacturing the same.SOLUTION: A process of forming at least one of a hole transport layer, a light emitting layer and an electron transport layer includes a process of forming a film material layer of the layer and a process of arranging a mask having a predetermined pattern formed thereon at an interval between the mask and the film material layer, and imparting activation energy to the film material layer through the mask while introducing active gas to between the mask and film material layer. The organic EL element is formed by performing patterning by an optical etching method, so that the organic EL display device is manufactured inexpensively with high accuracy compared with a case wherein coating is carried selectively by different colors using vapor-deposition masks.