| 摘要 |
A workpiece conveying system includes at least three workpiece storage chambers arranged in a predetermined arrangement direction. A conveyance chamber is provided adjacent to the workpiece storage chambers. A workpiece processing chamber is provided adjacent to the conveyance chamber on the side opposite the workpiece storage chambers. First and second workpiece conveying robots are disposed in the conveyance chamber. The workpiece conveying robots are controlled by a controller and convey workpieces between the workpiece processing chamber and the workpiece storage chambers. The first and second workpiece conveying robots are spaced from each other in the arrangement direction. Each workpiece conveying robot conveys a workpiece into and out of at least two of the workpiece storage chambers. |
