发明名称 SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR THIN FILM SOLAR CELL
摘要 <p>A system and a method for manufacturing semiconductor thin film solar cell are provided. The system comprises: channel heating means with several temperature zones (70); a plurality of thermo-chemical reaction containers (71) for containing thin film substrates; a rotation mechanism (72) driving the thermo-chemical reaction containers (71); a gas supplying station (73) for controlling the ambient; a control station (74) for controlling the relative movement between the channel heating means with several temperature zones (70) and the thermo-chemical reaction containers (71). The temperature of the substrates in the thermo-chemical reaction containers (71) varies continuously and stably following the relative movement between the production lines and the channel heating means with several temperature zones (70), thus the thermo-chemical reaction which is required in the production of semiconductor thin film solar cell is accomplished.</p>
申请公布号 WO2011130888(A1) 申请公布日期 2011.10.27
申请号 WO2010CN01286 申请日期 2010.08.24
申请人 GS-SOLAR (FU JIAN) COMPANY LIMITED;APOLLO PRECISION (BEIJING) LIMITED;LIN, CHAOHUI;LI, XIAOCHANG 发明人 LIN, CHAOHUI;LI, XIAOCHANG
分类号 H01L31/18;H01L31/032 主分类号 H01L31/18
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