EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, METHOD OF CONTROLLING EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, AND TARGET SUPPLY DEVICE

摘要

PROBLEM TO BE SOLVED: To improve usability and availability of an extreme ultraviolet light source apparatus.SOLUTION: A chamber device is used together with a laser light source 10, and may includes: a chamber 100 provided with at least one incident hole for guiding laser light L1 output from the laser light source 110 into the inside; a target supply unit 120 provided to the chamber 100 and configured to supply a target material 200 to a predetermined position in the chamber 100; a recovery control unit 301 configured to instruct the target supply unit 120 to execute recovery operation when a predetermined condition is met; a recovery unit 400 configured to perform the recovery operation as instructed by the recovery control unit 301; and a position measuring unit 302 configured to measures the position of the target material 200 supplied from the target supply unit 120 into the chamber 100.