| 摘要 |
The present invention provides an imprint apparatus which performs imprint processing of curing a resin on a substrate while pressing a mold against the resin, and transferring a pattern onto the substrate by separating the mold from the cured resin, the apparatus including a holding unit including a holding surface which comes into contact with the mold and configured to hold the mold on the holding surface, a measurement unit configured to measure a position of the mold on the holding surface, and a processing unit configured to perform preparation processing including at least one pressing operation of stabilizing the position of the mold on the holding surface by pressing the mold against the holding surface before the imprint processing.
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