PIEZOELECTRIC ACTUATOR AND MANUFACTURING METHOD FOR PIEZOELECTRIC ACTUATOR

摘要

Disclosed is a piezoelectric actuator with improved simplicity of construction and manufacturing flow. A fixed electrode (12) is formed on a base substrate (11). A dielectric layer (13) is formed on the surface of the base substrate (11). A lower electrode (14), at least one part of which is formed at a remove from the base substrate (11), is formed on the surface of the dielectric layer (13). A piezoelectric layer (15) is formed on the surface of the lower electrode (14). An upper electrode (16) is formed on the surface of the piezoelectric layer (15). A moveable electrode is formed by at least one part of the upper electrode (16) or the lower electrode (14) being moved by distortion in the piezoelectric layer (15) caused by the application of piezoelectric voltage.